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   Book Info

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Physics of Submicron Lithography  
Author: KamilĂ˝ Akhmetovich Valiev
ISBN: 0306435780
Format: Handover
Publish Date: June, 2005
 
     
     
   Book Review

From Book News, Inc.
A new stage in the development of microelectronics is connected with converting to devices of submicron size; processing materials into such small devices is possible with electron, ion, and x-ray lithographic methods--and this, according to Valiev (Academy of Sciences of the USSR), ". . . will unconditionally be the most important achievement in science and technology for the last quarter of the 20th century." The information presented here is for specialists in microelectronics who must equip, or reequip, themselves with knowledge of the physics of electron and ion beams and x-ray and ultraviolet radiation, including forming the beams and their interactions with matter. Annotation copyright Book News, Inc. Portland, Or.




Physics of Submicron Lithography

FROM THE CRITICS

Booknews

A new stage in the development of microelectronics is connected with converting to devices of submicron size; processing materials into such small devices is possible with electron, ion, and x-ray lithographic methods--and this, according to Valiev (Academy of Sciences of the USSR), ". . . will unconditionally be the most important achievement in science and technology for the last quarter of the 20th century." The information presented here is for specialists in microelectronics who must equip, or reequip, themselves with knowledge of the physics of electron and ion beams and x-ray and ultraviolet radiation, including forming the beams and their interactions with matter. Annotation c. Book News, Inc., Portland, OR (booknews.com)

     



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