From Book News, Inc.
Details both elementary and advanced aspects of sub-micron microlithography, discussing theoretical and operating practices and providing complete information on current research. Coverage includes mechanical systems; optics; excimer laser light sources; alignment techniques and analysis; resist chemistry; processing; multilayer lithography; plasma and reactive ion etching; metrology; electron beam, x-ray, and proximal probe techniques. For physicists as well as electrical, optical, semiconductor, integrated circuit process, and process equipment engineers. Book News, Inc.®, Portland, OR
Microlithography: Science and Technology FROM THE CRITICS
International Journal of Electrical Engineering Education
...The editors...have done an excellent gob of gathering the knowledge of a number of world experts and blending it into a harmonious whole which will serve as a reference for some time to come, even in this fast-moving field.
Booknews
Details both elementary and advanced aspects of sub-micron microlithography, discussing theoretical and operating practices and providing complete information on current research. Coverage includes mechanical systems; optics; excimer laser light sources; alignment techniques and analysis; resist chemistry; processing; multilayer lithography; plasma and reactive ion etching; metrology; electron beam, x-ray, and proximal probe techniques. For physicists as well as electrical, optical, semiconductor, integrated circuit process, and process equipment engineers. Annotation c. by Book News, Inc., Portland, Or.
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